Clean
Reticle Final Cleaning
UV Laser Light Cleaning
Proximity and Contact Photomask Cleaning
Double-sided Incoming Glass Clean
Layer Clean
UV Laser Surface Conditioning Clean

Coat
Resist Coat/Bake Processing
Poly Coat/High Temperature
Bake/Chill Processing
Spray Coat Processing

Develop
Resist Develop
Poly/Solvent Develop

Etch
Chrome Etch
ITO Etch
Aluminum Etch
Gold Etch
Oxide Layer Etch

Strip
Resist Stripping
Poly Stripping